I quite like how Sniper elite handles this. As you are tagging enemies, small snippets about them pop up. So the Nazi you have in your scopes might love jazz music even though it's illegal, or might draw caricatures of his fellow soldiers that give them some light hearted relief or might have tried out for the ss and failed the medical and takes his anger out on the locals.
It genuinely changes how I play the game. If they seem like they are just someone caught in the Nazi machine I tend to spare them if I can but I make pretty sure to end the true believers.